Transfer learning based 3D fuzzy multivariable control for an RTP system
Author:
Funder
National Natural Science Foundation of China
Publisher
Springer Science and Business Media LLC
Subject
Artificial Intelligence
Link
http://link.springer.com/content/pdf/10.1007/s10489-019-01557-7.pdf
Reference42 articles.
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3. Dassau E, Grosman B, Lewin DR (2006) Modeling and temperature control of rapid thermal processing. Comput Chem Eng 30(4):686–697
4. Zhang X -X, Li H -X, Wang B, Ma SW (2017) A hierarchical intelligent methodology for spatiotemporal control of wafer temperature in rapid thermal processing. IEEE Trans Semicond Manuf 30(1):52–59
5. Balakrishnan KS, Edgar TF (2000) Model-based control in rapid thermal processing. Thin Solid Films 365 (2):322–333
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