Publisher
Springer Science and Business Media LLC
Subject
Materials Chemistry,Surfaces, Coatings and Films,Condensed Matter Physics
Reference68 articles.
1. P. Muralt, A. Kholkin, M. Kohli, T. Maeder, K.G. Brooks, R. Luthier: Fabrication and Characterization of PZT Thin Films for Micromotors, Integr. Ferroelectrics, 1995, 11, pp. 213-220
2. S. Akamine, T.R. Albrecht, M.J. Zdeblick, C.F. Quate: A Planar Process for Microfabrication of a Scanning Tunneling Microscope, Sens. Actuat. A, 1990, 23, pp. 964-970
3. T.-A. Massood, MICROACTUATORS: Electrical, Magnetic, Thermal, Optical, Mechanical, Chemical and Smart Structures, H.L. Tuller, Series Ed., Kluwer Academic Publishers, 1998
4. A. Manz, N. Graber, and H.M. Widmer, Miniaturized Total Chemical Analysis Systems: A Novel Concept for Chemical Sensing, Sens. Actuat. B, 1990, 1, p 244-248; P. Bergveld, Proc. Micro Total Analysis Systems Workshop μ-TAS’94, 1994, 1
5. S. Koganezawa, Y. Uematsu, T. Yamada, H. Nakano, J. Inoue, T. Suzuki: Dual-stage Actuator System for Magnetic Disk Drives Using a Shear Mode Piezoelectric Microactuator, IEEE Trans. Magn., 1999, 35(2), pp. 988-992
Cited by
437 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献