A planar process for microfabrication of a scanning tunneling microscope-Reference-Cited by-同舟云学术

A planar process for microfabrication of a scanning tunneling microscope

Published:1990-04 Issue:1-3 Volume:23 Page:964-970
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Akamine S.,Albrecht T.R.,Zdeblick M.J.,Quate C.F.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference19 articles.

1. Single-tube three-dimensional scanner for scanning tunneling microscope;Binnig;Rev. Sci. Instrum.,1986

2. A planar process for an electric-to-fluidic valve;Zdeblick,1988

3. Vacuum tunneling;Binnig;Phys. Rev. Lett.,1982

4. Scanning tunneling microscope;Park;Rev. Sci. Instrum.,1987

5. Single-tube three-dimensional scanner for scanning tunneling microscope;Binnig;Rev. Sci. Instrum.,1986

Cited by 35 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. An Aerosol Deposition Method and its Application to Make Mems Devices;Ceramic Transactions Series;2012-04-25

2. Aerosol Deposition (AD) Integration Techniques and their Application to Microdevices;Ceramic Integration and Joining Technologies;2011-10-24

3. Micro Fabrication and Application of Thin Film Amorphous Alloys Using Three Dimensional Process;Journal of the Japan Society for Technology of Plasticity;2011

4. Aerosol techniques for manufacturing piezoelectric materials;Advanced Piezoelectric Materials;2010

5. Room Temperature Impact Consolidation (RTIC) of Fine Ceramic Powder by Aerosol Deposition Method and Applications to Microdevices;Journal of Thermal Spray Technology;2008-03-18