Fabrication and characterization of PZT thin films for micromotors-Reference-Cited by-同舟云学术

Fabrication and characterization of PZT thin films for micromotors

Published:1995-11 Issue:1-4 Volume:11 Page:213-220
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Muralt Paul¹,Kholkin Andrej¹,Kohli Markus¹,Maeder Thomas¹,Brooks Keith G.¹,Luthier Roland¹²

Affiliation:

1. a Laboratoire de Céramique, Ecole Politechnique Féderale, MX-D Ecublens , CH-1015, Lausanne, Switzerland

2. b Laboratoire de Céramique, Ecole Politechnique Féderale, MX-D Ecublens , ASULAB, CH-2074 Marin-Epagnier, Switzerland

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584589508013593

Reference15 articles.

1. Piezoelectric micromotors for microrobots

2. Moroney , R. M. White , R. M and Howe , R. T. 1990. Ultrasonic micromotors: physics and applications, Proc. IEEE-MEMS 182–187. Napa Valley, USA

3. Udayakumar , K. R. Bart , S. F. Flynn , A. M. Chen , J. Tavrow , L. S. Cross , L. E. Brooks , R. A. and Ehrlich , D. J. 1991. Ferroelectric thin film ultrasonic micromotors, Proc. IEEE-MEMS 109–113. Nara, Japan

4. Racine , G.A. Luthier , R. and de Rooj , N. F. 1993. Hybrid ultrasonic micromachined motors, Proc. IEEE-MEMS 128–132. Fort Lauderdale, USA

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