Fabrication and characterization of PZT thin films for micromotors

Author:

Muralt Paul1,Kholkin Andrej1,Kohli Markus1,Maeder Thomas1,Brooks Keith G.1,Luthier Roland12

Affiliation:

1. a Laboratoire de Céramique, Ecole Politechnique Féderale, MX-D Ecublens , CH-1015, Lausanne, Switzerland

2. b Laboratoire de Céramique, Ecole Politechnique Féderale, MX-D Ecublens , ASULAB, CH-2074 Marin-Epagnier, Switzerland

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

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