Study of amorphous Ta2O5 thin films by DC magnetron reactive sputtering-Reference-Cited by-同舟云学术

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Study of amorphous Ta2O5 thin films by DC magnetron reactive sputtering

Published:1997-04 Issue:4 Volume:26 Page:397-401
ISSN:0361-5235
Container-title:Journal of Electronic Materials
language:en
Short-container-title:Journal of Elec Materi

Author:

Chen K.,Nielsen M.,Yang G. R.,Rymaszewski E. J.,Lu T. -M.

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s11664-997-0109-5.pdf

Reference17 articles.

1. G.S. Oehrlein, J. Appl. Phys. 59, 1587 (1986).

2. X.M. Wu, P.K. Wu, T.-M. Lu and E.J. Rymaszewski, Appl. Phys. Lett. 62, 3264 (1993); X.M. Wu, S.R. Soss, E.J. Rymaszewski and T.-M. Lu, Mater. Chemistry and Phys. 38, 297 (1994).

3. F. Rubio, J. Denis, J.M. Albella and J.M. Martinez-Duart, Thin Soild Films 90, 405 (1982).

4. W.M. Paulson, F.S. Hickemell and R.L. Davis, J. Vac. Sci. Technol. 16, 307 (1979).

5. K.C. Lalra, P. Katyal and K.C. Singh, Thin Soild Films 177, 35 (1989).

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1. Investigation of the influence of plasma source power on the properties of magnetron sputtered Ta2O5 thin films;EPJ Web of Conferences;2021

2. Structure and charge transport of amorphous Cu-doped Ta2O5 : An ab initio study;Physical Review Materials;2020-06-08

3. K0.4TaO2.4F0.6 Nanocubes as Highly Efficient Noble Metal-Free Electrocatalysts for Hydrogen Evolution Reaction in Acidic Media;Electrochimica Acta;2017-08

4. Towards low voltage resistive switch in sol-gel derived TiO2/Ta2O5 stack thin films;Materials & Design;2016-09

5. Infrared optical properties of amorphous and nanocrystalline Ta2O5thin films;Journal of Applied Physics;2013-08-28

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