Anchor quality factor improvement of a piezoelectrically-excited MEMS resonator using window-like phononic crystal strip
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Link
https://link.springer.com/content/pdf/10.1007/s10999-023-09652-x.pdf
Reference35 articles.
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2. Bao, F.H., Wu, X.Q., Zhou, X., Wu, Q.D., Zhang, X.S., Bao, J.F.: Spider web-like phononic crystals for piezoelectric MEMS resonators to reduce acoustic energy dissipation. Micromachines 10(9), 626 (2019a)
3. Bao, F.H., Bao, J.F., Lee, J.E.Y., Bao, L.L., Khan, M.A., Zhou, X., Zhang, X.S.: Quality factor improvement of piezoelectric MEMS resonator by the conjunction of frame structure and phononic crystals. Sens. Actuators A 297, 111541 (2019b)
4. Bijay, J., DasGupta, A., Nair, D.R.: 1D and 2D wide acoustic bandgap phononic Crystal structures for performance improvement of AlN-on-Si resonators operating in GHz range. In: 2019 IEEE International Ultrasonics Symposium (IUS), pp. 1731–1734. IEEE (2019)
5. Chu, C.C., Dey, S., Liu, T.Y., Chen, C.C., Li, S.S.: Thermal-piezoresistive SOI-MEMS oscillators based on a fully differential mechanically coupled resonator array for mass sensing applications. J. Microelectromech. Syst. 27(1), 59–72 (2017)
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