Frame structure for thin-film piezoelectric-on-silicon resonator to greatly enhance quality factor and suppress spurious modes-Reference-Cited by-同舟云学术

Frame structure for thin-film piezoelectric-on-silicon resonator to greatly enhance quality factor and suppress spurious modes

Published:2018-05 Issue: Volume:274 Page:101-108
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Bao Fei-Hong,Bao Lei-Lei,Zhang Xiao-Sheng,Zhang Chao,Li Xin-Yi,Qin Feng,Zhang Ting,Zhang Yi,Wu Zhao-Hui,Bao Jing-Fu

Funder

National Natural Science Foundation of China and the China Academy of Engineering Physics

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference38 articles.

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