Quality factor improvement of piezoelectric MEMS resonator by the conjunction of frame structure and phononic crystals-Reference-Cited by-同舟云学术

Quality factor improvement of piezoelectric MEMS resonator by the conjunction of frame structure and phononic crystals

Published:2019-10 Issue: Volume:297 Page:111541
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Bao Fei-Hong,Bao Jing-Fu,Lee Joshua En-Yuan,Bao Lei-Lei,Khan Muhammad Ammar,Zhou Xin,Wu Qi-Die,Zhang Ting,Zhang Xiao-Sheng

Funder

National Natural Science Foundation of China

Key R&D Program of Sichuan Province

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference38 articles.

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4. Frequency-multiplication high-output triboelectric nanogenerator for sustainably powering biomedical microsystems;Zhang;Nano Lett.,2013

5. An SOI–MEMS technology using substrate layer and bonded glass as wafer-level package;Li;Sens. Actuators A Phys.,2002

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