Publisher
Springer Science and Business Media LLC
Subject
Nuclear and High Energy Physics
Cited by
30 articles.
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1. Physical Sputtering and Sputter Deposition;The Foundations of Vacuum Coating Technology;2018
2. Review Article: Tracing the recorded history of thin-film sputter deposition: From the 1800s to 2017;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2017-09
3. Sputtering Phenomena;Handbook of Sputtering Technology;2012
4. Sputtering Phenomena;Thin Film Materials Technology;2004
5. Electronic excitation in sputtered atoms and the oxygen effect;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1987-06