Sputtering Phenomena
Author:
Publisher
Elsevier
Reference67 articles.
1. Chopra K L. Thin films phenomena, New York, NY: McGraw-Hill; 1969. p. 91.
2. Thin‐film sputtering yields for Fe, Cr, and an Fe‐Cr alloy measured by proton‐induced x rays
3. On the fluence dependence of the sputtering yield for low-energy noble gas ions
4. Vacuum deposition of thin films;Holland,1961
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