SNMS studies of ULSI gate interconnection structures-Reference-Cited by-同舟云学术

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SNMS studies of ULSI gate interconnection structures

Published:1991 Issue:1-2 Volume:341 Page:20-24
ISSN:0937-0633
Container-title:Fresenius' Journal of Analytical Chemistry
language:en
Short-container-title:Fresenius J Anal Chem

Author:

Moro L.,Lazzeri P.,Ottaviani G.,Bacci L.,Queirolo G.,Anderle M.

Publisher

Springer Science and Business Media LLC

Subject

Biochemistry,Analytical Chemistry,Biochemistry

Link

http://link.springer.com/content/pdf/10.1007/BF00322100.pdf

Reference14 articles.

1. Vaidya S, Retajczyk TF, Knoell RV (1985) J Vac Sci Technol B3:846?852

2. Gierish H, Neppl F, Frenzel E, Eichinger P, Hieber K (1987) J Vac Sci Technol B5:508?514

3. Shone FC, Saraswat KC, Plummer JD (1985) Proc of the Internat Electron Devices Meeting, Tech Dig, pp 407?410

4. Nygren S, Amm DT, Levy D, Torres J, Goltz G, D'Ouville TT, Delpech P (1989) IEEE Trans Electr Dev 36:1087?1093

5. Shioya Y, Kawamura S, Kobayashi I, Maeda M, Yanagida K (1987) J Appl Phys 61:5102?5109

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2. Sekundärneutralteilchen-Massenspektrometrie (Plasma-SNMS);Analytiker-Taschenbuch;1997

3. Sputtered netural and molecular ion mass spectrometries in the characterization of multilayer samples;Surface and Interface Analysis;1992-11

4. Atomic Spectrometry Update—Advances in Atomic Absorption and Fluorescence Spectrometry and Related Techniques;J. Anal. At. Spectrom.;1992

5. Charge effects during surface analysis of poorly conducting inorganic materials;Fresenius' Journal of Analytical Chemistry;1991

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