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Optimal selection of dielectric film in piezoelectric MEMS microphone

  • Published:2019-05-30 Issue:11 Volume:25 Page:4227-4235
  • ISSN:0946-7076
  • Container-title:Microsystem Technologies
  • language:en
  • Short-container-title:Microsyst Technol

Author:

Gangidi Prashant,Gupta Navneet

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference28 articles.

1. Ashby MF (1999) Materials selection in mechanical design, 2nd edn. Butterworth-Heinemann, Oxford

2. Ashby M, Johnson K (2003) The art of materials selection. Materialstoday 6:24–25

3. Conrad H et al (2009) Aluminum nitride: a promising and full CMOS compatible piezoelectric material for MOEMS applications. SPIE Proc Smart Sensors Actuators MEMS 7362:73620J

4. Cook-Chennault KA, Thambi N, Sastry AM (2008) Powering MEMS portable devices-a review of non-regenerative and regenerative power supply systems with special emphasis on piezoelectric energy harvesting systems. Smart Mater Struct 17:33

5. Czarny J (2015) Conception, fabrication and characterization of a MEMS microphone. MS Thesis, INSA de Lyon University

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