High quality factor silicon cantilever driven by piezoelectric thin film actuator for resonant based mass detection-Reference-Cited by-同舟云学术

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High quality factor silicon cantilever driven by piezoelectric thin film actuator for resonant based mass detection

Published:2008-10-28 Issue:8 Volume:15 Page:1163-1169
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Lu Jian,Ikehara Tsuyoshi,Zhang Yi,Mihara Takashi,Itoh Toshihiro,Maeda Ryutaro

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s00542-008-0720-2.pdf

Reference24 articles.

1. Blom FR, Bouwstra S, Elwenspoek M, Fluitman JHJ (1992) Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry. J Vac Sci Technol B 10:19–26. doi: 10.1116/1.586300

2. Burg TP, Mirza AR, Milovic N, Tsau CH, Popescu GA, Foster JS, Manalis R (2006) Vacuum-packaged suspended microchannel resonant mass sensor for biomolecular detection. J Microelectromech Syst 15(6):1466–1476. doi: 10.1109/JMEMS.2006.883568

3. Burg TP, Godin M, Knudsen SM, Shen W, Carlson G, Foster JS, Babcock K, Manalis SR (2007) Weighing of biomolecules, single cells and single nanoparticles in fluid. Nature 446:1066–1069. doi: 10.1038/nature05741

4. Dohn S, Svendsen W, Boisen A (2007) Mass and position determination of attached particles on cantilever based mass sensors. Rev Sci Instrum 78(10):103303. doi: 10.1063/1.2804074

5. Hao Z, Erbil A, Ayazi F (2003) An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations. Sens Actuators A 109:156–164. doi: 10.1016/j.sna.2003.09.037

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