Fabrication and characterization of a piezoelectric micromirror using for optical data tracking of high-density storage-Reference-Cited by-同舟云学术

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Fabrication and characterization of a piezoelectric micromirror using for optical data tracking of high-density storage

Published:2013-10-08 Issue:7 Volume:20 Page:1317-1322
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Zhao Quanliang,Cao Maosheng,Yuan Jie,Lu Ran,He Guangping,Wang Dawei

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s00542-013-1931-8.pdf

Reference13 articles.

1. Chou PC, Lin YC, Cheng S (2010) A novel seesaw swivel actuator design and fabrication. IEEE Trans Magn 46:2603–2610

2. Jiang Y, Kanda K, Iga Y, Fujita T, Higuchi K, Maenaka K (2013) Monolithic integration of Pb(Zr, Ti)O3 thin film based resonators using a complete dry microfabrication process. Microsyst Technol 19:137–142

3. Kim SH, Yee Y, Choi J, Kwon H, Ha MH, Oh C, Bu JU (2004) Integrated MEMS optical flying head with lens positioning actuator for small form factor optical data storage. Sens Actuators A 114:429–437

4. Kurihara K, Hida M, Umemiya S, Kondo M, Koganezawa S (2006) Rotating symmetrical piezoelectric microactuators for magnetic head drives. Jpn J Appl Phys 45:7471–7474

5. Li JH, Wang CH, Ma J, Liu MW (2013) Micromachined ultrasonic transducers based on lead zirconate titanate (PZT) films. Microsyst Technol 19:211–218

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