Author:
Dragoi Viorel,Mittendorfer Gerald,Thanner Christine,Lindner Paul
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference11 articles.
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5. Maszara WP, Goetz G, Caviglia A, McKitterick JB (1988) Bonding of silicon wafers for silicon-on-insulator. J Appl Phys 64(10):4943–4950
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