Theoretical analysis of the sensing and actuating effects of piezoelectric multimorph cantilevers-Reference-Cited by-同舟云学术

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Theoretical analysis of the sensing and actuating effects of piezoelectric multimorph cantilevers

Published:2005-11-26 Issue:4 Volume:12 Page:335-342
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Liu Mengwei,Tong Jianhua,Wang Liding,Cui Tianhong

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s00542-005-0062-2.pdf

Reference19 articles.

1. Brissaud M, Ledren S, Gonnard P (2003) Modelling of a cantilever non-symmetric piezoelectric bimorph. J Micromech Microeng 13:832–844

2. Costa Branco PJ, Dente JA (2004) On the electromechanics of a piezoelectric transducer using a bimorph cantilever undergoing asymmetric sensing and actuation. Smart Materials Struct 13:631–642

3. DeVoe DL, Pisano AP (1997) Modeling and optimal design of piezoelectric cantilever microactuators. J Microelectromech Syst 6(3):266–270

4. DeVoe DL, Pisano AP (1997) A fully surface-micromachined piezoelectric accelerometer. In: 1997 international conference on solid state sensors and actuators, Chicago, 2:1205–1208

5. Du Liqun, Kwon Guiryong, Arai Fumihito, Fukuda Toshio, Itoigawa Kouichi, Tukahara Yasunori (2003) Structure design of micro touch sensor array. Sens Actuators A 107:7–13

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