Extra-Soft Tactile Sensor for Sensitive Force/Displacement Measurement with High Linearity Based on a Uniform Strength Beam

Abstract

The soft sensing system has drawn huge enthusiasm for the application of soft robots and healthcare recently. Most of them possess thin-film structures that are beneficial to monitoring strain and pressure, but are unfavorable for measuring normal displacement with high linearity. Here we propose soft tactile sensors based on uniform-strength cantilever beams that can be utilized to measure the normal displacement and force of soft objects simultaneously. First, the theoretical model of the sensors is constructed, on the basis of which, the sensors are fabricated for testing their sensing characteristics. Next, the test results validate the constructed model, and demonstrate that the sensors can measure the force as well as the displacement. Besides, the self-fabricated sensor can have such prominent superiorities as follows—it is ultra-soft, and its equivalent stiffness is only 0.31 N·m−1 (approximately 0.4% of fat); it has prominent sensing performance with excellent linearity (R2 = 0.999), high sensitivity of 0.533 pF·mm−1 and 1.66 pF·mN−1 for measuring displacement and force; its detection limit is as low as 70 μm and 20 μN that is only one-tenth of the touch of a female fingertip. The presented sensor highlights a new idea for measuring the force and displacement of the soft objects with broad application prospects in mechanical and medical fields.