Author:
Dutta Shankar,Gupta Nidhi,Yadav Isha,Pal Ramjay,Jain K. K.,Bhattacharya Dilip K.,Chatterjee Ratnamala
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference28 articles.
1. Basher MK, Hossain MK, Uddin MJ, Akand MAR, Shorowordi KM (2018) Effect of pyramidal texturization on the optical surface reflectance of monocrystalline photovoltaic silicon wafers. Optik 172:801
2. Bhandari R, Negi S, Rieth L, Solzbacher F (2010) A wafer-scale etching technique for high aspect ratio implantable MEMS structures. Sens Act A 162:130
3. Biswas K, Kal S (2006) Etch characteristics of KOH, TMAH and dual doped TMAH for bulk micromachining of silicon. Microelectron. 37:519
4. Dutta S, Pal R, Kumar P, Hooda OP, Singh J, Shaveta Saxena G, Datta P, Chatterjee R (2009) Fabrication challenges for realization of wet etching based comb type capacitive microaccelerometer structure. Sens Transducers 111:18
5. Dutta S, Imran Md, Kumar P, Pal R, Datta P, Chatterjee R (2011) Comparison of etch characteristics of KOH, TMAH and EDP for bulk micromachining of silicon (110). Microsyst Technol 17:1621
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