Electrical characterization of micromachined AlN resonators at various back pressures-Reference-Cited by-同舟云学术

Electrical characterization of micromachined AlN resonators at various back pressures

Published:2013-12-11 Issue:4-5 Volume:20 Page:663-670
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Ababneh Abdallah,Al-Omari A. N.,Dagamseh A. M. K.,Qiu H. C.,Feili D.,Ruiz-Díez V.,Manzaneque T.,Hernando J.,Sánchez-Rojas J. L.,Bittner A.,Schmid U.,Seidel H.

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s00542-013-2003-9.pdf

Reference20 articles.

1. Ababneh A, Kreher H, Schmid U (2008) Etching behaviour of sputter-deposited aluminium nitride thin films in H3PO4 and KOH solutions. Microsyst Technol 14(4–5):567–573

2. Ababneh A, Schmid U, Hernando J, Sanchez-Rojas JL, Seidel H (2010) The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films. Materials Science and Engineering B 172

3. Ababneh A, Al-Omari AN, Qiu HC, Manzaneque T, Hernando J, Sánchez-Rojas JL, Bittner A, Schmid U, Seidel H (2013) Pressure dependence of the quality factor of piezoelectrically driven AlN/Si-microcantilevers. Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 876334. doi: 10.1117/12.2017353

4. ADINA 8.8.4 Manuals (2013) ADINA R&D Inc. ( www.adina.com )

5. Andrei A, Krupa K, Jozwik M, Delobelle P, Hirsinger L, Gorecki C, Nieradko L, Meunier C (2008) AlN as an actuation material for MEMS applications. The case of AlN driven multilayered cantilevers. Sens Actuators A 141:565–576

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