Quantitative Simultaneous Determination for Young’s Modulus and Adhesion of Low-k Thin Film by Non-destructive CZM-SAW Technique
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Published:2019-05-17
Issue:2
Volume:38
Page:
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ISSN:0195-9298
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Container-title:Journal of Nondestructive Evaluation
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language:en
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Short-container-title:J Nondestruct Eval
Author:
Qi Haiyang,Xiao Xia,Kong Tao
Funder
National Natural Science Foundation of China
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials
Reference32 articles.
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