1. See, for instance, VLSI Technology: Fundamentals and Applications, ed. Y. Tarui (Springer-Verlag, Berlin, 1986), p. 308.
2. E. K. Yung, L. T. Romankiw, and R. C. Alkire, J. Electrochem. Soc.136, 206 (1989).
3. W. C. Shumay, Jr. Adv. Mater. Proc.135, 43 (1989).
4. A. N. Saxena, Keynote Address in Proc. First International IEEE Conf. on VLSI Multilevel Interconnections, IEEE Catalog #84CH1999-2, June 21–22, 1984, p. 1.
5. A. N. Saxena, in Proc. of the Seminar on VLSI State-of-the Art Multilevel Interconnection, (Santa Clara, CA, 1989) p. 2.