Author:
Park Jun-Hyub,An Joong-Hyok,Kim Yun-Jae,Choi Hyeon-Chang
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Computational Mechanics
Reference16 articles.
1. Spearing, S.M., Materials issues in microelectromechanical systems (MEMS). Acta Materialia, 2000, 48: 179–196.
2. Nix, W.D., Mechanical properties of thin films. Metallurgical Transactions, 1989, 20(A): 2217–2245.
3. Vinci, R.P. and Vlassak, J.J., Mechanical behavior of thin films. Annual Review Materials Science, 1996, 26: 431–462.
4. Kraft, O. and Volkert, C.A., Mechanical testing of thin films and small Structures. Advanced Engineering Materials, 2001, 3(3): 99–110.
5. Sharpe, W.N., Mechanical Properties of MEMS Materials, in The MEMS Handbook. CRC Press, 2001.
Cited by
7 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献