Analysis of fluid-structure interaction for predicting resonant frequencies and quality factors of a microcantilever on a squeeze-film
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials
Link
http://link.springer.com/content/pdf/10.1007/s12206-011-0820-2.pdf
Reference26 articles.
1. S. H. Lim, D. Raorane, S. Satyanarayana and A. Majumdar, Nano-chemo-mechanical sensor array platform for highthroughput chemical analysis, Sensors and Actuators B: Chemical, 119(2) (2006) 466–474.
2. P. S. Waggoner and H. G. Craighead, The relationship between material properties, device design, and the sensitivity of resonant mechanical sensors, Journal of Applied Physics, 105(5) (2009) 054306.
3. M. Spletzer, A. Raman, A. Q. Wu and X. Xu, Ultrasensitive mass sensing using mode localization in coupled microcantilevers, Applied Physics Letters, 88(25) (2006) 254102.
4. Z. J. Guo, N. E. McGruer and G. G. Adams, Modeling, simulation and measurement of the dynamic performance of an ohmic contact, electrostatically actuated RF-MEMS switch, Journal of Micromechanics and Microengineering, 17(9) (2007) 1899–1909.
5. A. Granaldi and P. Decuzzi, The dynamic response of resistive microswitches: switching time and bouncing, Journal of Micromechanics and Microengineering, 16(7) (2006) 1108–1115.
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