The combined effects of temperature and relative humidity on resonant frequency and quality factor of MEMS beam resonators in atmospheric pressure and gas rarefaction-Reference-Cited by-同舟云学术

The combined effects of temperature and relative humidity on resonant frequency and quality factor of MEMS beam resonators in atmospheric pressure and gas rarefaction

Published:2023-07-31 Issue:9 Volume:29 Page:1357-1373
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Le Quoc Cuong,Phan Minh Truong,Trinh Xuan Thang,Truong Huu Ly,Ngo Vo Ke Thanh,Nguyen Chi Cuong

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

https://link.springer.com/content/pdf/10.1007/s00542-023-05514-w.pdf

Reference45 articles.

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3. Brand O, Dufour I, Heinrich S et al (2015) Ressonant MEMS fundamentals, Implementation and Application. WILEY-VCH

4. Ghaffari S, Ng EJ, Ahn CH et al (2015) Accurate modeling of quality factor behavior of complex silicon MEMS resonators. J Microelectromech S 24:276–288. https://doi.org/10.1109/JMEMS.2014.2374451

5. Greenspan L (1976) Functional equations for the enhancement factors for CO2–free moist air. J Res Nat Bur Stand A Phys Chem 80:41–44. https://doi.org/10.6028/jres.080A.007

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