Temperature and Relative Humidity Dependence of Quality Factors of MEMS Cantilever Resonators in Atmospheric Pressure
Author:
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Instrumentation
Link
https://link.springer.com/content/pdf/10.1007/s11220-021-00359-x.pdf
Reference58 articles.
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2. Kim, S., Kihm, K. D., & Thundat, T. (2010). Fluidic applications for atomic force microscopy (AFM) with microcantilever sensors. Experiments in Fluids. https://doi.org/10.1007/s00348-010-0830-3
3. Takahashi, H., Dung, N. M., Matsumoto, K., & Shimoyama, I. (2012). Differential pressure sensor using a piezoresistive cantilever. Journal of Micromechanics and Microengineering. https://doi.org/10.1088/0960-1317/22/5/055015
4. Toda, M., Inomata, N., Ono, T., & Voiculescu, I. (2017). Cantilever beam temperature sensors for biological applications. IEEJ Transactions on Electrical and Electronic Engineering. https://doi.org/10.1002/tee.22360
5. Baller, M. K., Lang, H. P., Fritz, J., Gerber, C., Gimzewski, J. K., Drechsler, U., Rothuizen, H., Despont, M., Vettiger, P., Battiston, F. M., & Ramseyer, J. P. (2000). A cantilever array-based artificial nose. Ultramicroscopy. https://doi.org/10.1016/S0304-3991(99)00123-0
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