Precision interferometric surface metrology of transparent thin film using wavelength tuning
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials
Link
http://link.springer.com/article/10.1007/s12206-017-1037-9/fulltext.html
Reference26 articles.
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3. P. de Groot and L. Deck, Surface profiling by analysis of white-light interferograms in the spatial frequency domain, J. Mod. Opt., 42 (2) (1995) 389–401.
4. S. W. Kim and G. H. Kim, Thickness profile measurement of transparent thin-film layers by white-light scanning interferometry, Appl. Opt., 38 (28) (1999) 5968–5973.
5. Y. S. Ghim and S. W. Kim, Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry, Opt. Express, 14 (24) (2006) 11885–11891.
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