Measurement of highly reflective surface compensating correlated error by sampling window
Author:
Publisher
SPIE
Reference31 articles.
1. Surface profilometry of silicon wafers using wavelength-tuned phase-shifting interferometry
2. Interferometric profilometry of absolute optical thickness of transparent plate using wavelength tuning fringe analysis
3. A Review of Thickness Measurements of Thick Transparent Layers Using Optical Interferometry
4. Measurement of transparent plates with wavelength-tuned phase-shifting interferometry
5. Simultaneous measurement of several near-parallel surfaces with wavelength-shifting interferometry and a tunable phase-shifting method
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