Author:
Miao Fuqing,Ahn Seokyoung,Moon Young Hoon,Kim Yangjin
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials
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4. Y. Kim, Precision interferometric surface metrology of transparent thin film using wavelength tuning, Journal of Mechanical Science and Technology, 31(11) (2017) 5423–5428.
5. Y. Kim, K. Hibino, N. Sugita and M. Mitsuishi, Surface profile measurement of a highly reflective silicon wafer by phase-shifting interferometry, Applied Optics, 54(13) (2015) 4207–4213.
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