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2. SEMI M1 Standard for silicon wafers. http://ams.semi.org/ebusiness/standards/SEMIStandardDetail.aspx?ProductID=1948&DownloadID=3469
3. International Roadmap for Semiconductors ITRS. http://www.itrs.net/Links/2013ITRS/2013Chapters/2013Overview.pdf and International Technical Roadmap for Photovoltaics, http://www.itrpv.net/Reports/Downloads/
4. Kolbesen, B.O., Strunk, H.: VLSI electronics: microstructure science. In: Einspruch, N.G., Huff, H.R. (eds.) Silicon Materials, vol. 12, p. 143. Academic Press, New York (1985)
5. http://www.semi.org/Standards