Author:
Kim Sang-Hyun,Boyd James G.
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials
Reference10 articles.
1. Chang, C., Chang, P., 2000, “Innovative Micromachined Microswitch with Very Low Insertion Loss,”Sensors and Actuators, Vol. A79, pp. 71–75.
2. Freund, L. B., 1996, “Some Elementary Connections Between Curvature and Mismatch Strain in Compositionally Graded thin Films,”Journal of the Mechanics and Physics of Solids,44 pp. 723–736.
3. Kiang, M. H., Solgaard, O., Muller, R. S., Lau, K. Y., 1996, “Silicon-Micromachined Micromirrors with Integral High-Precision Actuators for External-Cavity Semiconductor Laser,”IEEE Photonics Technology Letters, Vol. 8, pp. 95–97.
4. Kim, S. -H., Boyd, J. G., 2006, “Modeling of Mechanical Behavior of Microcantilever Due to Intrinsic Strain During Deposition,”Accepted for Publishing in the Journal of Mechanical Science and Technology, Vol. 20, No. 10., pp. 0–0.
5. Madou, M., 1993,Fundamentals of Microfabrication, Boca Raton: CRC Press, LLC.
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献