Author:
Chang Chienliu,Chang Peizen
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. C.T.-C. Nguyen, Microelectromechanical Devices for Wireless Communications, IEEE MEMS'98, pp. 1–7.
2. C.T.-C. Nguyen, Micromachining Technologies for Miniaturized Communication Devices, SPIE 3515-202, Santa Clara, CA, 21–22 Sep., 1998, pp. 24–38.
3. R.F. Drayton, L.P.B. Ketehi, Development of Miniature Microwave Circuit Components Using Micromachining Techniques, IEEE MTT-S Digest, 1994, pp. 225–228.
4. Micromechanical membrane switch on silicon;Petersen;IBM J. Res. Dev.,1979
5. L.E. Larson, R.H. Hackett, M.A. Melendes, R.F. Lohr, Micromachined Microwave Actuator (MIMAC) Technology — a New Turning Approach for Microwave Integrated Circuits, IEEE 1991 MMIC Symposium, pp. 27–30.
Cited by
66 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献