Design and Investigation of Pressure Sensor Based on Charge Plasma Silicon NWFET with Cylindrical Gate Diaphragm
Author:
Publisher
Springer Science and Business Media LLC
Subject
Electronic, Optical and Magnetic Materials
Link
http://link.springer.com/content/pdf/10.1007/s12633-019-00344-w.pdf
Reference37 articles.
1. Eaton WP, Smith JH (1997) Micromachined pressure sensors: review and recent developments. Smart Mater Struct 6(5):530–539
2. Judy JW (2001) Microelectromechanical systems (MEMS): fabrication, design and applications. Smart Mater Struct 10(6):1115
3. Pramanik C, Saha H, Gangopadhyay U (2006) Design optimization of a high performance silicon MEMS piezoresistive pressure sensor for biomedical applications. J Micromech Microeng 16(10):2060–2066
4. Dorey AP (1975) A high sensitivity semiconductor strain sensitive circuit. Solid-State Electron 18(4):295–299
5. Neumeister J, Schuster G, Von Münch W (1985) A silicon pressure sensor using MOS ring oscillators. Sensors Actuators 7(3):167–176
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