Author:
Suman Shreya,Punetha Deepak,Pandey Saurabh Kumar
Publisher
Springer Science and Business Media LLC
Subject
Electronic, Optical and Magnetic Materials
Reference25 articles.
1. Eaton WP, Smith JH (1997) Micromachined pressure sensors: review and recent developments. Smart Mater Struct 6(05):530–539
2. Bogue R (2007) MEMS sensors: past, present and future. Sensor Rev 27(1):7–13
3. Eswaran P, Subramani M (2013) MEMS capacitive pressure sensors: A review on recent development and prospective. Int J Eng Technol 5(3):0975–4024
4. Nguyen TK, Phan HP, Dinh T, Dowling KM, Foisal AR, Senesky DG, Nguyen NT, Dao DV (2018) Highly sensitive 4H-SiC pressure sensor at cryogenic and elevated temperatures. Mater Des (156):441–445
5. Phan HP, Dowling KM, Nguyen TK, Dinh T, Senesky DG, Namazu T, Dao DV, Nguyen NT (2018) Highly sensitive pressure sensors employing 3C-SiC nanowires fabricated on a free standing structure. Mater Des (156):16–21
Cited by
7 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献