In-situ Vapor-Phase Lubrication of MEMS-Reference-Cited by-同舟云学术

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In-situ Vapor-Phase Lubrication of MEMS

Published:2007-11-27 Issue:1 Volume:29 Page:67-74
ISSN:1023-8883
Container-title:Tribology Letters
language:en
Short-container-title:Tribol Lett

Author:

Asay David B.,Dugger Michael T.,Kim Seong H.

Publisher

Springer Science and Business Media LLC

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering,Mechanics of Materials

Link

http://link.springer.com/content/pdf/10.1007/s11249-007-9283-0.pdf

Reference22 articles.

1. Chau, K.H.-L., Lewis, S.R., Zhao, Y., Howe, R.T., Bart, S.F., Marcheselli, R.G.: An integrated force-balanced capacitive accelerometer for low-g applications. Sens. Actuators A 54, 472–476 (1996)

2. Eaton, W.P., Smith, J.H.: Micromachined pressure sensors: review and recent developments. Smart Mater. Struct. 6, 530–539 (1997)

3. Verdonckt-Vandebroek, S.: Micromachining technology for thermal ink jet products. Proceedings of SPIE–Micromachined Devices and Components III, 3224, 180–184 (1997)

4. Fan, L.-S., Tai, Y.-C., Muller, R.S.: IC-processed electrostatic micromotors. Sens. Actuators 20, 41–47 (1989)

5. Henck, S.A.: Lubrication of digital micromirror devicesTM. Tribol. Lett. 3, 239–247 (1997)

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