Effects of annealing temperature on the optical, bonding, structural and electrical properties of nitrogenated amorphous carbon thin films grown by surface wave microwave plasma chemical vapor deposition-Reference-Cited by-同舟云学术

Effects of annealing temperature on the optical, bonding, structural and electrical properties of nitrogenated amorphous carbon thin films grown by surface wave microwave plasma chemical vapor deposition

Published:2006-01 Issue:2 Volume:41 Page:537-547
ISSN:0022-2461
Container-title:Journal of Materials Science
language:en
Short-container-title:J Mater Sci

Author:

Rusop M.,Omer A. M. M.,Adhikari S.,Adhikary S.,Uchida H.,Soga T.,Jimbo T.,Umeno M.

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

http://link.springer.com/content/pdf/10.1007/s10853-005-2635-y.pdf

Reference84 articles.

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