Novel microwave plasma reactor for diamond synthesis
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.120997
Reference9 articles.
1. Rotationally symmetrical electric fields and electron density distributions in a microwave plasma used in optical fibre production
2. Plasma enhanced chemical vapor deposition modeling
3. Modelling the electromagnetic field and plasma discharge in a microwave plasma diamond deposition reactor
4. Modelling the electromagnetic field and plasma discharge in a microwave plasma diamond deposition reactor
5. Numerical simulations of microwave plasma reactors for diamond CVD
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