Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference25 articles.
1. National Technology Roadmap for Semiconductors (1997) Semiconductor Industry Association, San Jose, CA
2. Dowsett MG (1997) In: Gillen G, Larea R, Bennet J, Steve F (eds) Proceedings of the SIMS XI Conference. Wiley, Chichester
3. Barrett M, Dennis M, Tiffin D, Li Y, Shih K (1995) IEEE Electron Device Lett 16:118
4. Gong L, Petersen S, Frey L, Ryssel H (1995) Nucl Instrum Methods Phys Res B 96:133
5. Neubauer G, Lawrence M, Dass A, Johnson TJ (1992) Mater Res Soc Symp Proc 286:283
Cited by
11 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献