Quantitative hydrogen measurements in PECVD and HWCVD a-Si:H using FTIR spectroscopy
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Link
http://link.springer.com/content/pdf/10.1007/s10853-006-0302-6.pdf
Reference15 articles.
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2. Suzuki K (1998) In: Searle T (ed) Properties of a-Si:H and its alloys, EMIS DataReviews Series No.19. INSPEC, p 325
3. Staebler DL, Wronski CR (1977) Appl Phys Lett 31:292
4. Li Q, Biswas R (1996) Appl Phys Lett 68:2261
5. Mahan AH, Carapella J, Nelson BP, Crandall RS, Balberg I (1991) J Appl Phys 69:6728
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