Author:
Howlader M. M. R.,Suga T.,Takahashi A.,Saijo K.,Ozawa S.,Nanbu K.
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference13 articles.
1. T. SUGA and K. OSTUKA, in Proceedings of 51th IEEE ECTC Conference (2001) p. 1003.
2. T. SUGA, A. TAKAHASHI, K. SAIJO and S. OOSAWA, in 1st Int. IEEE Conf. Pol. Adhes. Microel. Photon., Polytron. (2001) p. 29.
3. N. J. CHOU, D. W. DONG, J. KIM and A. C. LIU, J. Electrochem. Soc 131(10) (1984) 2335.
4. P. LAURENS, S. PETIT and F. AREFI-KHONSARI, Plasm. Polym 8(4) (2003) 281.
5. J. S. CHO, W. K. CHOI, S. K. KOH and K. H. YOON, J. Vac. Sci. Technol B16(3) (1998) 1110.
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