High-quality spin-on glass-based oxide as a matrix for embedding HfO2 nanoparticles for metal-oxide-semiconductor capacitors-Reference-Cited by-同舟云学术

High-quality spin-on glass-based oxide as a matrix for embedding HfO2 nanoparticles for metal-oxide-semiconductor capacitors

Published:2011-10-18 Issue:5 Volume:47 Page:2248-2255
ISSN:0022-2461
Container-title:Journal of Materials Science
language:en
Short-container-title:J Mater Sci

Author:

Molina Joel,Munoz Ana Luz,Calleja Wilfrido,Rosales Pedro,Torres Alfonso

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

http://link.springer.com/content/pdf/10.1007/s10853-011-6036-0.pdf

Reference12 articles.

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5. Byun K, Jung D, Lee J, Lee S, Kim H, Kim M, Hong E, Gang M, Nam S, Moon J, Chung C, Lee J, Lee H (2010) International conference on interconnect technology. IEEE, New York, p. 1

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