Preparation of (001) preferentially oriented titanium thin films by ion-beam sputtering deposition on thermal silicon dioxide-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Preparation of (001) preferentially oriented titanium thin films by ion-beam sputtering deposition on thermal silicon dioxide

Published:2015-12-21 Issue:7 Volume:51 Page:3329-3336
ISSN:0022-2461
Container-title:Journal of Materials Science
language:en
Short-container-title:J Mater Sci

Author:

Gablech Imrich,Svatoš Vojtěch,Caha Ondřej,Hrabovský Miloš,Prášek Jan,Hubálek Jaromír,Šikola Tomáš

Funder

Ministry of Education, Youth and Sports (CZ)

European Regional Development Fund

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

http://link.springer.com/content/pdf/10.1007/s10853-015-9648-y.pdf

Reference22 articles.

1. Chawla V, Jayaganthan R, Chawla AK, Chandra R (2009) Microstructural characterizations of magnetron sputtered Ti films on glass substrate. J Mater Process Technol 209(7):3444–3451. doi: 10.1016/j.jmatprotec.2008.08.004

2. Chen C-N (2012) Fully quantitative characterization of CMOS–MEMS polysilicon/titanium thermopile infrared sensors. Sens Actuators B 161(1):892–900. doi: 10.1016/j.snb.2011.11.058

3. Doll JC, Petzold BC, Ninan B, Mullapudi R, Pruitt BL (2010) Aluminum nitride on titanium for CMOS compatible piezoelectric transducers. J Micromech Microeng 20(2):25008. doi: 10.1088/0960-1317/20/2/025008

4. López JM, Gordillo-Vázquez FJ, Fernández M, Albella JM (2001) Influence of oxygen on the morphological and structural properties of Ti thin films grown by ion beam-assisted deposition. Thin Solid Films 384(1):69–75. doi: 10.1016/S0040-6090(00)01804-6

5. Tsuchiya T, Hirata M, Chiba N (2005) Young’s modulus, fracture strain, and tensile strength of sputtered titanium thin films. Thin Solid Films 484(1–2):245–250. doi: 10.1016/j.tsf.2005.02.024

Cited by 18 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ultra-strength of Ti films via (002) texture optimization and nanocolumnar strengthening;Materials Science and Engineering: A;2024-03

2. Damage threshold in pre-heated optical materials exposed to intense X-rays;Optical Materials Express;2023-02-28

3. Ultra-Strength Ti Films Via (002) Texture Optimization and Nanocolumnar Strengthening;2023

4. Ultra-Strength of Ti Films Via (002) Texture Optimization and Nanocolumnar Strengthening;2023

5. Piezoelectric Micromachined Ultrasound Transducer Technology: Recent Advances and Applications;Biosensors;2022-12-29

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3