Author:
Bourgeois A.,Turcant Y.,Walsh Ch.,Defranoux Ch.
Publisher
Springer Science and Business Media LLC
Subject
Surfaces and Interfaces,General Chemical Engineering,General Chemistry
Reference6 articles.
1. Baklanov, M.R., Mogilnikov, K.P., Polovinkin, V.G., Dultsev, F.N.: Determination of pore size distribution in thin films by spectroscopic ellipsometry. J. Vac. Sci. Technol. B 18, 1385 (2000)
2. Baklanov, M.R., Mogilnikov, K.P.: Determination of Young’s Modulus of porous low-k films by ellipsometric porosimetry. Electrochem. Solid-State Lett. 5(12), F29–F31 (2002)
3. Boissière, C., Grosso, D., Lepoutre, S., Nicole, L., Brunet-Bruneau, A., Sanchez, C.: Porosity and mechanical properties of mesoporous thin films assessed by environmental ellipsometric porosimetry. Langmuir 21(26), 12362–12371 (2005)
4. Bourgeois, A., Brunet-Bruneau, A., Jousseaume, V., Rochat, N., Fisson, D., Demarets, B., Rivory, J.: Description of the porosity of inhomogeneous MSQ films using solvent adsorption studied by spectroscopic ellipsometry in the visible range. Thin Solid Films 455–456, 366 (2004)
5. Bourgeois, A.: Adsorption et condensation de gaz dans des couches minces diélectriques mésoporeuses suivies par ellipsométrie spectroscopique. PhD Thesis, University of Paris 6, 149 (2005)
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