Taking piezoelectric microsystems from the laboratory to production-Reference-Cited by-同舟云学术

Taking piezoelectric microsystems from the laboratory to production

Published:2007-03-06 Issue:4 Volume:19 Page:357-362
ISSN:1385-3449
Container-title:Journal of Electroceramics
language:en
Short-container-title:J Electroceram

Author:

Ræder H.,Tyholdt F.,Booij W.,Calame F.,Østbø N. P.,Bredesen R.,Prume K.,Rijnders G.,Muralt P.

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanics of Materials,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s10832-007-9036-3.pdf

Reference12 articles.

1. W.E. Booij, A.H. Vogl, D.T. Wang, F. Tyholdt , N.P. Østbø, H. Ræder, K. Prume, J. Electroceramics, (2006) (in press)

2. K.D. Budd, S.K. Dey, D.A. Payne, Br. Ceram. Proc. 36, 107 (1985)

3. P.J. Caber, Appl. Opt. 32(19) 3438 (1993)

4. S.R. Gurkovich, J.B. Blum, in Ultrastruct. Process. Ceram., Glasses, Compos, ed. by L.L. Hench, D.R. Ulrich (Wiley, NY, 1984), p. 152

5. N. Ledermann, P. Muralt, J. Baborowski, M. Forster, J.-P. Pellaux, J. Micromechanics Microengineering, 1650 (2004)

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