Piezoelectric Pb(Zrx, Ti1 x)O3thin film cantilever and bridge acoustic sensors for miniaturized photoacoustic gas detectors-Reference-Cited by-同舟云学术

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Piezoelectric Pb(Zrx, Ti1 x)O3thin film cantilever and bridge acoustic sensors for miniaturized photoacoustic gas detectors

Published:2004-08-27 Issue:12 Volume:14 Page:1650-1658
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Ledermann Nicolas,Muralt Paul,Baborowski Jacek,Forster Martin,Pellaux Jean-Paul

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference25 articles.

1. Ultralow Gas Concentration Infrared Absorption Spectroscopy

2. Improved design for fast modulating IR sources

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