Author:
Zier M.,Oswald S.,Reiche R.,Wetzig K.
Publisher
Springer Science and Business Media LLC
Subject
Biochemistry,Analytical Chemistry
Reference13 articles.
1. Semiconductor Industry Association (1999) The international technology roadmap for semiconductors, 1999 edn. Semiconductor Ind Assoc, Santa Clara, CA, p 176
2. Catania P, Doyle JP, Cuomo JJ (1992) J Vac Sci Technol A 10:3318–3321
3. Ono T, Amazawa T, Nishimura H, Matsuo S (1999) J Vac Sci Technol B 17:2385–2389
4. Kaloyeros AE, Eisenbraun E (2000) Annu Rev Mater Sci 30:363–385
5. Moshfegh AZ, Akhavan O (2000) Thin Solid Films 370:10–17
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