Microstructure and mechanical properties of TiAlSiN nano-composite coatings deposited by ion beam assisted deposition
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Engineering,General Materials Science
Link
http://link.springer.com/content/pdf/10.1007/s11431-015-5878-0.pdf
Reference50 articles.
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3. Oh U C, Je J H. Effects of strain energy on the preferred orientation of TiN thin films. J Appl Phys, 1993; 74: 1692–1696
4. Jarms C, Stock H R, Mayr P. Mechanical properties, structure and oxidation behaviour of Ti1-x AlxN-hard coatings deposited by pulsed d.c. plasma-assisted chemical vapour deposition (PACVD). Surf Coat Tech, 1998; 108: 206–210
5. Musil J, Hrubý H. Superhard nanocomposite Ti1-x AlxN films prepared by magnetron sputtering. Thin Solid Films, 2000; 365: 104–109
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