Mechanical properties, structure and oxidation behaviour of Ti1-xAlxN-hard coatings deposited by pulsed d.c. plasma-assisted chemical vapour deposition (PACVD)-Reference-Cited by-同舟云学术

Mechanical properties, structure and oxidation behaviour of Ti1-xAlxN-hard coatings deposited by pulsed d.c. plasma-assisted chemical vapour deposition (PACVD)

Published:1998-10 Issue: Volume:108-109 Page:206-210
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Jarms C,Stock H.-R,Mayr P

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference15 articles.

1. T. Leyendecker, Über neuartige Schneidwerkzeugbeschichtungen auf Titan-und Aluminiumbasis, Dissertation, Technische Hochschule Aachen, 1993.

2. Morphology and properties of sputtered (Ti,Al)N layers on high speed steel substrates as a function of deposition temperature and sputtering atmosphere

3. Industrial deposition of binary, ternary, and quaternary nitrides of titanium, zirconium, and aluminum

4. TixAl1−xN films deposited by ion plating with an arc evaporator

5. High-temperature oxidation of ion-plated TiN and TiAlN films

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