Superhard nanocomposite Ti1−xAlxN films prepared by magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference18 articles.
1. Titanium aluminum nitride films: A new alternative to TiN coatings
2. Industrial deposition of binary, ternary, and quaternary nitrides of titanium, zirconium, and aluminum
3. Reactive unbalanced magnetron sputtering of the nitrides of Ti, Zr, Hf, Cr, Mo, Ti-Al, Ti-Zr and Ti-Al-V
4. On structure and properties of sputtered Ti and Al based hard compound films
5. The development of the PVD coating TiAlN as a commercial coating for cutting tools
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