Influences of laser energy density and annealing on structure properties of AIN films prepared by pulsed laser deposition-Reference-Cited by-同舟云学术

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Influences of laser energy density and annealing on structure properties of AIN films prepared by pulsed laser deposition

Published:2007-07 Issue:4 Volume:3 Page:286-288
ISSN:1673-1905
Container-title:Optoelectronics Letters
language:en
Short-container-title:Optoelectron. Lett.

Author:

Lü Lei,Li Qing-shan,Li Li,Zhang Li-chun,Wang Cai-feng,Qi Hong-xia,Zheng Mengmeng

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s11801-007-6187-z.pdf

Reference21 articles.

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2. R. D. Vispute, J. Narayan, and H. Wu, J. Appl. Phys., 77 (1995), 4724.

3. W. J. Moore, J. A. Freitas, and R. T. Holm, Appl. Phys. Lett., 86(2005), 141912.

4. F. S. Liu, Q. L. Liu, and J. K. Liang, J. Appl. Phys, 99(2006), 053515.

5. S. W. Chen, H. F. Lin, and T. T. Sung, Electron. Lett., 39 (2003), 1691.

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