Synthesis and SAW characteristics of AlN thin films fabricated on Si and GaN using helicon sputtering system
Author:
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://digital-library.theiet.org/content/journals/10.1049/el_20031088?crawler=true&mimetype=application/pdf
Reference8 articles.
1. Optimizing surface acoustic wave sensors for trace chemical detection
2. Piezoelectric AlN film for SAW devices applications
3. Epitaxially grown GaN thin-film SAW filter with high velocity and low insertion loss
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2. AlN thin film growth using electron cyclotron resonance reactive sputtering;Journal of Physics: Conference Series;2014-11-27
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4. Effect of Thermal Annealing on the SAW Properties of AlN Films Deposited on Si Substrate;Journal of the Korean Physical Society;2009-04-15
5. AlN on silicon based surface acoustic wave resonators operating at 5 GHz;Electronics Letters;2009
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